Dr. Michiteru Yamaura
at Osaka Univ
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Light sources, Opacity, Chemical species, Ions, Plasmas, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Tin

Proceedings Article | 23 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Opacity, Ions, Laser development, Nd:YAG lasers, Extreme ultraviolet, YAG lasers, Pulsed laser operation, Plasma, Tin, Absorption

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Opacity, Particles, Ions, Plasmas, Laser ablation, Extreme ultraviolet, Pulsed laser operation, EUV optics, Tin

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Foam, Cameras, Particles, Ions, Plasmas, Nd:YAG lasers, Xenon, Extreme ultraviolet, Pulsed laser operation, Tin

Proceedings Article | 20 September 2004 Paper
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Lithography, Opacity, Laser energy, Laser applications, Extreme ultraviolet, Optical simulations, Excimer lasers, Plasma, Tin, Absorption

Showing 5 of 10 publications
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