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Mick Giusti
Project Manager at KLA Corp
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Publications (2)
Proceedings Article | 8 June 2010 Paper
Results from a new 193nm die-to-database reticle inspection platform
Damon Kvamme, Weston Sousa, Rui-fang Shi, William Broadbent, Michael Giusti, Yalin Xiong, David Alles, Robert Walsh
Proceedings Volume 7748, 774828 (2010) https://doi.org/10.1117/12.868417
KEYWORDS: Reticles, Inspection, Extreme ultraviolet, Image resolution, Logic, Defect detection, Image transmission, EUV optics, Defect inspection, Image segmentation
Proceedings Article | 5 April 2007 Paper
Results from a new die-to-database reticle inspection platform
Proceedings Volume 6518, 65182I (2007) https://doi.org/10.1117/12.712367
KEYWORDS: Reticles, Inspection, Image transmission, Databases, Imaging systems, Image processing, Data modeling, Defect detection, Optical proximity correction, Sensors
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