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Miguel D. Hernandez
at SOPRALAB
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Publications (1)
Proceedings Article | 20 September 2004 Paper
Laser doping for microelectronics and microtechnology
Thierry Sarnet, Gurwan Kerrien, Nourdin Yaakoubi, Alain Bosseboeuf, Elisabeth Dufour-Gergam, Dominique Debarre, Jacques Boulmer, Kuniyuki Kakushima, Cyrille Laviron, Miguel Hernandez, Julien Venturini, Tarik Bourouina
Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.547759
KEYWORDS: Silicon, Bridges, Laser processing, Boron, Doping, Annealing, Semiconductor lasers, Laser applications, Laser energy, Photomasks
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