Dr. Miguel A. Larotonda
at Colorado State Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 8 October 2007
Proc. SPIE. 6702, Soft X-Ray Lasers and Applications VII
KEYWORDS: Optical amplifiers, Silver, Laser applications, Amplifiers, Solids, Spatial coherence, Picosecond phenomena, X-ray lasers, Pulsed laser operation, Plasma

Proceedings Article | 15 January 2007
Proc. SPIE. 6403, Laser-Induced Damage in Optical Materials: 2006
KEYWORDS: Sputter deposition, Laser induced damage, X-ray diffraction, Optical coatings, Oxygen, Ion beams, Laser damage threshold, Picosecond phenomena, Hybrid fiber optics, Plasma

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Microscopes, Imaging systems, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Zone plates, Plasma

Proceedings Article | 13 September 2005
Proc. SPIE. 5919, Soft X-Ray Lasers and Applications VI
KEYWORDS: Cadmium, Ions, Refraction, Picosecond phenomena, X-ray lasers, Molybdenum, Grazing incidence, Tellurium, Plasma, Tin

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Laser sources, Microscopes, Imaging systems, Silicon, Reflectivity, Image resolution, Objectives, Extreme ultraviolet, Spatial resolution, Zone plates

Showing 5 of 6 publications
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