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Mike Anderson
Product Manager at DCM Tech Corp
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Publications (1)
Proceedings Article | 23 April 1999 Paper
Practical issues in the deployment of a run-to-run control system in a semiconductor manufacturing facility
Jerry Stefani, Mike Anderson
Proceedings Volume 3742, (1999) https://doi.org/10.1117/12.346250
KEYWORDS: Process control, Process modeling, Semiconducting wafers, Control systems, Data modeling, Model-based design, Semiconductor manufacturing, Metrology, Instrument modeling, Data processing
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