Mike Becker
Engineer at Univ Bremen
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Actuators, Switching, Etching, Electrodes, Nickel, Heat treatments, Semiconducting wafers, Electroplating, Prototyping, Microrelays

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