Mike W. Quillen
Technical Service Manager at Eastman Chemical Co
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Semiconductors, Statistical analysis, Foam, Diffractive optical elements, Water, Particles, Chemistry, Semiconducting wafers, Surface finishing, Liquids

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