Mike Whelan
President at Verity Instruments Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Inspection, Semiconducting wafers, Reflectivity, Manufacturing, Wafer-level optics, Head, Polarization, Beam propagation method, Wafer inspection, Image processing

Proceedings Article | 19 September 1995
Proc. SPIE. 2637, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing
KEYWORDS: Etching, Semiconducting wafers, Plasma etching, Plasma, Data modeling, Sensors, Signal processing, Statistical modeling, Monochromators, Interference (communication)

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