Dr. Mikhail Haurylau
Systems Engineer at Nanometrics Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 9, 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Oxides, Polymethylmethacrylate, Etching, Silicon, Photonic crystals, Liquid crystals, Plasma etching, Electro optics, Optical microcavities, Plasma

PROCEEDINGS ARTICLE | September 13, 2005
Proc. SPIE. 5926, Tuning the Optical Response of Photonic Bandgap Structures II
KEYWORDS: Switching, Birefringence, Etching, Electrodes, Silicon, Liquid crystals, Aluminum, Silicon photonics, Optical interconnects, Semiconducting wafers

PROCEEDINGS ARTICLE | October 14, 2004
Proc. SPIE. 5511, Tuning the Optical Response of Photonic Bandgap Structures
KEYWORDS: Refractive index, Mirrors, Etching, Silicon, Liquid crystals, Picosecond phenomena, Geometrical optics, Optical interconnects, Semiconducting wafers, Optical microcavities

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