Dr. Mikhail Haurylau
Systems Engineer at Onto Innovation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 February 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Optical microcavities, Photonic crystals, Silicon, Electro optics, Liquid crystals, Oxides, Plasma etching, Plasma, Polymethylmethacrylate, Etching

Proceedings Article | 13 September 2005
Proc. SPIE. 5926, Tuning the Optical Response of Photonic Bandgap Structures II
KEYWORDS: Silicon, Liquid crystals, Switching, Silicon photonics, Electrodes, Etching, Aluminum, Semiconducting wafers, Optical interconnects, Birefringence

Proceedings Article | 14 October 2004
Proc. SPIE. 5511, Tuning the Optical Response of Photonic Bandgap Structures
KEYWORDS: Silicon, Liquid crystals, Optical interconnects, Picosecond phenomena, Optical microcavities, Refractive index, Semiconducting wafers, Etching, Geometrical optics, Mirrors

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