Mikhail Krishtab
at KU Leuven
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 May 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Carbon, Metrology, Titanium dioxide, Etching, Silicon, Scanning electron microscopy, Atomic layer deposition, Chlorine, Semiconducting wafers, Plasma

Proceedings Article | 18 December 2014 Paper
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: FT-IR spectroscopy, Etching, Polymers, Dielectrics, Ions, Chemistry, Oxygen, Vacuum ultraviolet, Polymer thin films, Plasma

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