Dr. Mikhail V. Lebedev
at Ioffe Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 January 2007
Proc. SPIE. 6596, Advanced Optical Materials, Technologies, and Devices
KEYWORDS: Semiconductors, Chemical species, Annealing, Molecules, Ions, Sulfur, Ionization, Adsorption, Gallium, Arsenic

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