Mr. Mikhail Litavrin Profile

Mikhail Litavrin

at MERI JSC

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 15 March 2019 Paper

Cellular automata method for directed self-assembly modeling

E. Gornev, M. Litavrin, I. Matyushkin, O. Gushin

Proceedings Volume 11022, 110221N (2019) https://doi.org/10.1117/12.2522482

KEYWORDS: Polymers, Directed self assembly, Polymethylmethacrylate, Molecules, Molecular self-assembly, Annealing, Lithography, Motion models, Process modeling

Read Abstract +

The formulation of a cellular automaton (CA) model for self-organization processes in low-temperature annealing of a block copolymer in the method of directed self-assembly lithography (DSA) is presented. The model is considered for the geometry of the cylinder and block copolymer AB, A= polystyrene, B= poly(methylmethacrylate). The characteristic cell size of the CA was the length of the Kuhn segment is equal to 1.67 nm, and the quantum of time was taken as 5.3⋅10⁻⁸ s. The CA lattice was a hexagonal prism in the wafer plane, the layers of which are displaced relative to each other in vertical direction. The neighborhood has Neumann template. Mode of CA operation was pair-asynchronous. The cell state was characterized by a set of triples: the polymer number, the number of segments, the segment type (A/B), i.e. the polymers are distributed among the CA cells by their segments. The transition function was correlated with the movement of one segment, and determined by the configuration rule that limits the possible transitions, and selected in a probabilistic way. The random variable draw took into account the state of the extended neighborhood, and the probability values were selected, based on convenience, by a formula similar to the expression of Fermi-Dirac statistics.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years