Dr. Mikhail Silakov
at Mentor Graphics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | October 29, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Lithography, Photovoltaics, Optical lithography, Visualization, Photomasks, Source mask optimization, Optical proximity correction, Nanoimprint lithography, Performance modeling, Resolution enhancement technologies

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