We present a non-contact type monitoring system specially devised to control the cutting depth on the grinding process.
This system comprises a one axis scanning stage and the imaging system using line camera and collimated white light
source. Experimental results prove that the proposed system is useful, especially for the monitoring system in grinding
the piston groove on the cylinder with a few micrometers accuracy in the dozens of millimeter area.
We present a method of three dimensional shape measurement from the curvature data, which are obtained from the
subaperture topography along the diagonal direction of artifact by using white-light scanning interferometry. The
curvature is an intrinsic property of the artifact, which does not depend on the positioning errors of measuring sensor.
Experimental results prove that the proposed method is useful, especially for large-scale optical surface profile
measurement with nanometer accuracy.
The current version of this paper has had a correction made to it at the request of the author. Please see the linked Errata for further details.