Dr. Min-Ho Kim
Senior Researcher at SAMSUNG Electro-Mechanics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 24, 2011
Proc. SPIE. 8123, Eleventh International Conference on Solid State Lighting
KEYWORDS: Light emitting diodes, Crystals, Silicon, Atomic force microscopy, Gallium nitride, Sapphire, Very large scale integration, Semiconducting wafers, Quantum dot light emitting diodes, Blue light emitting diodes

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Lithography, Modulation, Inspection, Scanning electron microscopy, Process control, Finite element methods, Wafer inspection, Panoramic photography, Semiconducting wafers, Defect inspection

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