Dr. Min-Ho Kim
Senior Researcher at SAMSUNG Electro-Mechanics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 September 2011
Proc. SPIE. 8123, Eleventh International Conference on Solid State Lighting
KEYWORDS: Silicon, Light emitting diodes, Gallium nitride, Sapphire, Crystals, Semiconducting wafers, Quantum dot light emitting diodes, Blue light emitting diodes, Atomic force microscopy, Very large scale integration

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Finite element methods, Inspection, Scanning electron microscopy, Semiconducting wafers, Lithography, Wafer inspection, Modulation, Process control, Panoramic photography, Defect inspection

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