Min Choo
at KLA Korea
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Reticles, Optical lithography, Coating, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Yield improvement

Proceedings Article | 13 July 2017 Paper
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Databases, Inspection, Data processing, Photomasks

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