In complex phase-shift interferometry, an adaptive phase algorithm based on complex vibration environment is proposed. The phase shift amount calculation of two or more interferometric images could be achieved by self-adaptive phase-shift algorithm (SPA), a closed-loop feedback system is constructed to adaptively correct the characteristic phase shift amount in which the phase shift step length is a set value, thereby realizing self-correction of the phase shift error. According to the actual examinations, the single-step phase shift error is less than π/50, and PV and RMS values of plane objects were obtained respectively better than λ/20 and λ/100. Additionally, the feasibility of the algorithm and the self-adaptive correction system for complex vibration environment were verified. The results show that the proposed method achieves high-speed and high-precision phase-shift extraction, greatly reducing the phase shift error caused by vibration interference, and the overall operation of measurement process is simple relatively.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.