Mr. Min Xiang
at SIMIT
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 30, 2004
Proc. SPIE. 5279, Optical Fibers and Passive Components
KEYWORDS: Microelectromechanical systems, Mirrors, Fabry–Perot interferometers, Polishing, Fabry–Perot interferometry, Silicon, Reflectivity, Chemical elements, Semiconducting wafers, Surface finishing

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