Dr. Min Zhao
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 1 May 2008
OE Vol. 47 Issue 05
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Proceedings Article | 4 January 2008
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Gold, Electron beam lithography, Polymethylmethacrylate, X-rays, Silicon, Photomasks, Photoresist processing, X-ray telescopes, Electroplating, X-ray lithography

Proceedings Article | 21 November 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Electron beams, Backscatter, Chemical species, Silicon, Hydrogen, Nanoimprint lithography, Nanolithography

Proceedings Article | 21 November 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Gold, Electron beam lithography, Diffraction, Electron beams, Spectroscopy, X-rays, X-ray diffraction, Silicon, Photomasks, X-ray lithography

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