Min Zhong
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 24, 2013
Proc. SPIE. 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage
KEYWORDS: Polishing, Etching, Germanium, Resistance, Corrosion, Chemical elements, Antimony, Tellurium, Temperature metrology, Chemical mechanical planarization

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