Minako Azumi
at Nikon Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | October 5, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Semiconductors, Lithography, Polishing, Silica, Optical properties, Sensors, Glasses, Manufacturing, Photomasks, Surface finishing

PROCEEDINGS ARTICLE | November 23, 2015
Proc. SPIE. 9632, Laser-Induced Damage in Optical Materials: 2015
KEYWORDS: Polarization, Laser induced damage, Crystals, Calcium, Laser irradiation, Transmittance, Excimer lasers, Laser crystals, Crystal optics, Absorption

PROCEEDINGS ARTICLE | December 4, 2010
Proc. SPIE. 7842, Laser-Induced Damage in Optical Materials: 2010
KEYWORDS: Laser sources, Microscopes, Optical microscopes, Laser induced damage, Crystals, Calcium, Nd:YAG lasers, Excimer lasers, Laser crystals, Crystallography

PROCEEDINGS ARTICLE | December 21, 2007
Proc. SPIE. 6720, Laser-Induced Damage in Optical Materials: 2007
KEYWORDS: Scattering, Air contamination, Crystals, X-rays, Calcium, Light scattering, Oxygen, Transmission electron microscopy, Transmittance, Infrared radiation

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