Dr. Mindy Lee
Senior Engineer Manager at SAMSUNG Semiconductor Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Logic, Optical lithography, Chromium, Photomasks, Optical proximity correction, Critical dimension metrology, Optimization (mathematics), Semiconducting wafers, Model-based design

PROCEEDINGS ARTICLE | October 1, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Nano opto mechanical systems, Image processing, Image quality, Design for manufacturing, Image enhancement, Optical proximity correction, Nanoimprint lithography, Neodymium, Optimization (mathematics), Resolution enhancement technologies

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