Dr. Mindy Lee
Senior Engineer Manager at SAMSUNG Semiconductor Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Photomasks, Lithography, Optical lithography, Optical proximity correction, Chromium, Model-based design, Logic, Optimization (mathematics), Semiconducting wafers, Critical dimension metrology

PROCEEDINGS ARTICLE | October 1, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Optical proximity correction, Image quality, Optimization (mathematics), Nanoimprint lithography, Image enhancement, Image processing, Design for manufacturing, Resolution enhancement technologies, Neodymium, Nano opto mechanical systems

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