Ming-Chun Tseng
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 March 2015 Paper
Proceedings Volume 9363, 93630M (2015) https://doi.org/10.1117/12.2076678
KEYWORDS: Gallium nitride, Interfaces, Plasma, Molybdenum, Oxides, Capacitors, Contamination, Field effect transistors, Dielectrics, Silicon

Proceedings Article | 9 March 2015 Paper
Ming-Chun Tseng, Chi-Lu Chen, Nan-Kai Lai, Dong-Sing Wuu, Hsin-Ying Lee, Yu-Chang Lin, Ray-Hua Horng
Proceedings Volume 9383, 93830D (2015) https://doi.org/10.1117/12.2079507
KEYWORDS: Light emitting diodes, Thin films, Aluminium gallium indium phosphide, Atomic layer deposition, Thin film devices, Resistance, Zinc oxide, Refractive index, Silicon, Silicon films

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