Mr. Ming-Saing Tsai Profile

Ming-Saing Tsai

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Publications (1)

Proceedings Article | 12 October 2020 Poster + Paper

Development of extreme ultraviolet light sources and techniques for optical power meter calibration

Wei-Jo Ting, Yi-Chen Chuang, Cheng-Hsien Chen, Ming-Shian Tsai, Ming-Chang Chen

Proceedings Volume 11517, 1151719 (2020) https://doi.org/10.1117/12.2573060

KEYWORDS: Extreme ultraviolet, Optical power meters, Calibration, Light sources, Spectroscopy, Photoresist developing, Semiconductors, Pulsed laser operation, Diffraction gratings, Lithography

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