Dr. Ming Lu
Nanofabrication Scientific Associate at Brookhaven National Lab
SPIE Involvement:
Area of Expertise:
electron beam lithography , nanofabrication , plasma etching , x-ray optics , nanophotonics , OLED
Publications (13)

Proceedings Article | 5 October 2023 Presentation + Paper
Proceedings Volume 12698, 1269803 (2023) https://doi.org/10.1117/12.2673688
KEYWORDS: Optical alignment, Optical surfaces, Interferometers, X-ray optics, Machine learning, Hard x-rays, Lenses, X-rays, X-ray microscopy, Equipment

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 1249810 (2023) https://doi.org/10.1117/12.2658685
KEYWORDS: High volume manufacturing, Extreme ultraviolet lithography, Atomic layer deposition, Photoresist materials, Electron beam lithography, Thin films, Silicon, Resistance, Polymethylmethacrylate, Photoresist processing

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12498, 124981A (2023) https://doi.org/10.1117/12.2658659
KEYWORDS: Optical lithography, Oxides, Metals, Polymer thin films, Nanolithography, Nanocomposites, Materials processing, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet

Proceedings Article | 11 November 2022 Presentation
Proceedings Volume PC12292, PC122920L (2022) https://doi.org/10.1117/12.2643226
KEYWORDS: Extreme ultraviolet lithography, Polymethylmethacrylate, Photoresist materials, Silicon, Resistance, Indium oxide, Etching, Electron beam lithography, Dry etching, Plasma

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12054, PC120540G (2022) https://doi.org/10.1117/12.2618064
KEYWORDS: Nanostructures, Optoelectronics, Thin films, Thin film devices, Polymers, Polymer thin films, Photoresist materials, Oxides, Optoelectronic devices, Microelectromechanical systems

Showing 5 of 13 publications
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