Dr. Ming Lu
Nanofabrication Scientific Associate at Brookhaven National Lab
SPIE Involvement:
Author
Area of Expertise:
electron beam lithography , nanofabrication , plasma etching , x-ray optics , nanophotonics , OLED
Publications (5)

SPIE Journal Paper | September 14, 2017
OE Vol. 57 Issue 01
KEYWORDS: Semiconductor lasers, Quantum wells, Laser damage threshold, Quantum cascade lasers, Reflectivity, Waveguide lasers, Heterojunctions, Aluminum, Continuous wave operation, Waveguides

PROCEEDINGS ARTICLE | March 9, 2017
Proc. SPIE. 10132, Medical Imaging 2017: Physics of Medical Imaging
KEYWORDS: Semiconductors, Photon counting, Sensors, Signal attenuation, Electrodes, Luminescence, Crystals, X-rays, Monte Carlo methods, Detector development, X-ray imaging, Selenium, Signal detection, Prototyping, Breast imaging

SPIE Journal Paper | July 24, 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Etching, Plasma etching, Polymers, Plasma, Optical lithography, Silicon, Polymethylmethacrylate, Scanning electron microscopy, Thin films, Reactive ion etching

PROCEEDINGS ARTICLE | March 17, 2012
Proc. SPIE. 8328, Advanced Etch Technology for Nanopatterning
KEYWORDS: Thin films, Optical lithography, Polymethylmethacrylate, Etching, Polymers, Image processing, Silicon, Oxygen, Plasma etching, Plasma

PROCEEDINGS ARTICLE | September 10, 2008
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Gold, Electron beam lithography, Etching, X-rays, Zone plates, Plating, Reactive ion etching, Photoresist processing, Electroplating, Hard x-rays

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