CONFERENCE PROCEEDINGS
Advanced Search
Minghao Song
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 21 April 2006 Paper
The influences of thickness on piezoresistive properties of poly-Si nanofilms
Xiaowei Liu, Rongyan Chuai, Minghao Song, Huiyan Pan, Xiaowei Xu
Proceedings Volume 6186, 61860V (2006) https://doi.org/10.1117/12.662348
KEYWORDS: Silicon, Doping, Resistance, Crystals, Sensors, Silicon films, Data modeling, Scanning electron microscopy, Actuators, Microelectromechanical systems
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top