Minghao Song
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Microelectromechanical systems, Actuators, Data modeling, Sensors, Crystals, Silicon, Resistance, Doping, Scanning electron microscopy, Silicon films

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