Ming-kai Zhang
at Hefei Univ of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 October 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Actuators, Lithography, Microscopes, Ferroelectric materials, Metrology, Interferometers, Calibration, Wavelets, Ultraviolet radiation, Objectives

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top