Dr. Mingliang Wang
at Xiamen Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7157, 2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications
KEYWORDS: Transmitters, Signal attenuation, Electrodes, Receivers, Electromagnetic radiation, Signal processing, Finite element methods, Computer networks, Detection theory, Electromagnetism

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Microelectromechanical systems, Lithography, Metals, Crystals, Copper, Nickel, Scanning electron microscopy, Micromachining, Electroplating, Surface finishing

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Fabrication, Etching, Dry etching, Silicon, Photomasks, Wet etching, Reactive ion etching, Semiconducting wafers, Anisotropic etching, Device simulation

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