Mingon Lee
at Dongbu HiTek Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Oxides, Plasma, Reactive ion etching, Optical lithography, Etching, Scanning electron microscopy, Polymers, LCDs, Diffractive optical elements, Ions

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Etching, Silicon, Silica, Optical lithography, Dry etching, Light sources, Image processing, Chemical mechanical planarization, Chemistry, Scanning electron microscopy

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Silicon, Oxides, Double patterning technology, Etching, Optical lithography, Photomasks, Lithography, Photoresist processing, Thermal oxidation, Oxidation

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