Dr. Mingqi Li
Principal Research Scientist at DuPont Electronics and Imaging
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Transparency, 3D applications, Polymers, Molecules, Coating, Photoresist materials, Transmittance, Absorbance, Photoresist developing

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Gold, Antireflective coatings, Nanoparticles, Molecules, Ions, Silicon, Mass spectrometry, Photoresist materials, Photoresist developing, Molecular electronics

SPIE Journal Paper | 13 September 2019
JM3 Vol. 18 Issue 03

SPIE Journal Paper | 6 June 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Ions, Polymers, Silicon, Photoresist materials, Mass spectrometry, Molecules, Photoresist developing, Neodymium, Gold, Chemical analysis

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Gold, Polymers, Molecules, Ions, Silicon, Mass spectrometry, Chemical analysis, Semiconducting wafers, Chemically amplified resists

Showing 5 of 18 publications
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