Dr. Mingqi Li
Principle Research Scientist at Dow DuPont Inc
SPIE Involvement:
Author
Publications (15)

SPIE Journal Paper | 6 June 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Ions, Polymers, Silicon, Photoresist materials, Mass spectrometry, Molecules, Photoresist developing, Neodymium, Gold, Chemical analysis

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Gold, Polymers, Molecules, Ions, Silicon, Mass spectrometry, Chemical analysis, Semiconducting wafers, Chemically amplified resists

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Polymers, Chemistry, Scanning electron microscopy, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Chemical species, Polymers, Annealing, Ions, Silicon, Diffusion, Doping, Boron, Antimony, Polymer thin films

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Chemical species, Polymers, Annealing, Silicon, Coating, Doping, Boron, Semiconducting wafers, Polymer thin films

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Gold, Statistical analysis, Polymers, Molecules, Ions, Mass spectrometry, Photoresist materials, Photoresist developing, Polymer thin films, Molecular aggregates

Showing 5 of 15 publications
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