Piezoelectric micro nebulizer is a typical piezoelectric-solid-liquid coupling problem. A 2D FEM model was presented
for this system. Numerical results show that when the piezoelectric actuator is vibrated, nozzle film also is generated
vibration, and the phase relationship occurs to them, and the operation at the second resonance frequency is more
desirable than others. A good agreement between experimental results and theoretical results confirmed the validity of
the theoretical model we developed. Therefore, the design of micro nebulizer to consider only the amplitude of
piezoelectric vibration is not comprehensive, we must also consider the nozzle film vibration, as well as the phase
between the back film and the nozzle film, and this can provide guidance for the optimal design of micro nebulizer.