Dr. Mingxing Chen
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Mirrors, Microlens array, Lithographic illumination, Control systems, Micromirrors, Photomasks, Optical simulations, Optical scanning systems, 193nm lithography

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Optical components, Lithography, Microlens array, Lithographic illumination, Diffractive optical elements, Polarization, Wave plates, Microlens, Micromirrors, 193nm lithography

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