Mr. Mingxue Huo
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | November 1, 2007
Proc. SPIE. 6423, International Conference on Smart Materials and Nanotechnology in Engineering
KEYWORDS: Fabrication, Glasses, Silicon, Numerical simulations, Convection, Semiconducting wafers, Anisotropic etching, Prototyping, Device simulation, Liquids

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Sensors, Etching, Silicon, Resistance, Computer simulations, Finite element methods, Bridges, Optical simulations, Beam shaping, Wheatstone bridges

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Vibration simulation, Sensors, Silicon, Finite element methods, Microelectronics, Optical simulations, Deep reactive ion etching, Structural design, Bulk micromachining

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