Minhee Jung
at Hanyang Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Semiconducting wafers, Silicon, Photoresist materials, Temperature metrology, Lithography, Diffusion, Dielectrics, Chemically amplified resists, Antireflective coatings, Nitrogen

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Nanoimprint lithography, Lithography, Double patterning technology, Critical dimension metrology, Immersion lithography, Microfluidics, Optical lithography, Binary data, Physics, Ultraviolet radiation

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Diffusion, Photomasks, Nanoimprint lithography, Phase shifts, Critical dimension metrology, Double patterning technology, Lithography, Electroluminescence, Immersion lithography, Image processing

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