Minhee Jung
at Hanyang Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 14, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Antireflective coatings, Dielectrics, Silicon, Diffusion, Nitrogen, Photoresist materials, Semiconducting wafers, Temperature metrology, Chemically amplified resists

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Microfluidics, Optical lithography, Ultraviolet radiation, Physics, Double patterning technology, Immersion lithography, Nanoimprint lithography, Critical dimension metrology, Binary data

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Image processing, Diffusion, Electroluminescence, Photomasks, Double patterning technology, Immersion lithography, Nanoimprint lithography, Critical dimension metrology, Phase shifts

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