Prof. Minoru Sasaki Profile

Prof. Minoru Sasaki

Associate Professor at Tohoku Univ

SPIE Involvement:

Author

Proceedings Article | 7 March 2007 Paper

The silicon mold fabrication of a kind of micro-optical resonator and coupler

Hui Ju, Takayuki Ohta, Satoru Takao, Masafumi Ito, Minoru Sasaki, Kazuhiro Hane, Masaru Hori

Proceedings Volume 6462, 64620I (2007) https://doi.org/10.1117/12.697130

KEYWORDS: Etching, Semiconducting wafers, Silicon, Crystals, Resonators, Anisotropic etching, Polymethylmethacrylate, Micro optical resonators, Reflection, Optical lithography

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Proceedings Article | 21 April 2006 Paper

Compact triangulation sensor realized by bending wafer with metal hinge

Minoru Sasaki, Satoshi Endou, Masayuki Fujishima, Kazuhiro Hane

Proceedings Volume 6186, 618606 (2006) https://doi.org/10.1117/12.662466

KEYWORDS: Sensors, Semiconducting wafers, Copper, Metals, Silicon, Mirrors, Free space optics, Optical alignment, Electrodes, Annealing

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Proceedings Article | 16 August 2004 Paper

Compact triangulation distance sensor realized by wafer bending technique

Minoru Sasaki, Satoshi Endou, Kazuhiro Hane

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545267

KEYWORDS: Sensors, Semiconducting wafers, Mirrors, Silicon, Geometrical optics, Electrodes, Optical alignment, Collimation, Beam propagation method, Diffraction

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Proceedings Article | 24 April 2003 Paper

Optical components and actuators for integrated near-field optical data storage

Kazuhiro Hane, Yoshiaki Kanamori, Minoru Sasaki, Jong Hyeong Song

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498885

KEYWORDS: Near field scanning optical microscopy, Silicon, Optical components, Optical storage, Near field optics, Particles, Near field, Waveguides, Actuators, Silica

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Proceedings Article | 10 September 2002 Paper

Micro translation table for near-field data storage using inverted-scratch-drive actuators

Yoshiaki Kanamori, Hiroto Yahagi, Minoru Sasaki, Takahito Ono, Kazuhiro Hane

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483192

KEYWORDS: Electrodes, Near field, Near field scanning optical microscopy, Photomicroscopy, Data storage, Etching, Near field optics, Head, Silicon, Low pressure chemical vapor deposition

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Proceedings Article | 21 November 2001 Paper

Si micromachining for optics: optical components and sensors

Kazuhiro Hane, Minoru Sasaki, Jong Hyeong Song

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448978

KEYWORDS: Silicon, Actuators, Photodiodes, Optical components, Etching, Optical fibers, Shape memory alloys, Particles, Sensors, Position sensors

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Proceedings Article | 8 May 2001 Paper

Tunable-wavelength filter using fiber Bragg gratings combined with a surface micromachining technology

Jong Hyeong Song, Taguchi Youhei, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 4416, (2001) https://doi.org/10.1117/12.427008

KEYWORDS: Fiber Bragg gratings, Optical filters, Refractive index, Polishing, Silicon, Tunable filters, Optical fibers, Wavelength division multiplexing, Surface finishing, Water

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Proceedings Article | 25 August 2000 Paper

Anisotropically etched Si molds for fabricating fine optical components

Yigui Li, Takehiro Fujii, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396473

KEYWORDS: Silicon, Optical components, Reactive ion etching, Fabrication, Optical microcavities, Microfabrication, Optical lithography, Crystals, Etching, Waveguides

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Proceedings Article | 15 September 1999 Paper

Novel optical sensors fabricated by Si micromachining

Minoru Sasaki

Proceedings Volume 3825, (1999) https://doi.org/10.1117/12.364301

KEYWORDS: Photodiodes, Silicon, Sensors, Actuators, Thin films, Position sensors, Shape memory alloys, Interferometers, Automatic alignment, Mirrors

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Proceedings Article | 2 September 1999 Paper

Ultrathin Si photodetector for an integrated optical interferometer

Xiaoyu Mi, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361278

KEYWORDS: Interferometers, Photodiodes, Silicon, Thin films, Photodetectors, Sensors, Phase shifts, Mirrors, Light sources, Waveguides

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Proceedings Article | 30 August 1999 Paper

High-aspect-ratio two-dimensional silicon subwavelength gratings fabricated by fast atom beam etching

Yoshiaki Kanamori, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361239

KEYWORDS: Silicon, Reflectivity, Surface finishing, Reflection, Etching, Polarization, Polishing, Chemical species, Scanning electron microscopy, Photomicroscopy

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Proceedings Article | 7 May 1999 Paper

Antireflection structures for visible and infrared wavelengths fabricated on silicon substrates by fast atom beam etching

Yoshiaki Kanamori, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347723

KEYWORDS: Reflectivity, Silicon, Reflection, Etching, Antireflective coatings, Chemical species, Visible radiation, Infrared radiation, Polarization, Crystals

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Proceedings Article | 30 April 1999 Paper

Laser interferometer using thin film photodetector

Minoru Sasaki, Xiaoyu Mi, Kazuhiro Hane

Proceedings Volume 3631, (1999) https://doi.org/10.1117/12.348310

KEYWORDS: Photodiodes, Thin films, Interferometers, Sensors, Silicon, Mirrors, Absorption, Photodetectors, Light wave propagation, Sensing systems

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Proceedings Article | 2 September 1998 Paper

Micromachined structure for Si transmission optical components

Minoru Sasaki, Yuji Arai, Hitoshi Takebe, Wataru Kamada, Kazuhiro Hane

Proceedings Volume 3513, (1998) https://doi.org/10.1117/12.324286

KEYWORDS: Silicon, Photodiodes, Optical components, Beam splitters, Deep reactive ion etching, 3D applications, Position sensors, Spatial filters, Fabrication

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Proceedings Article | 22 June 1998 Paper

Precise automatic alignment of a pinhole integrated with photodiodes

Minoru Sasaki, Yuji Arai, Wataru Kamada, Kazuhiro Hane

Proceedings Volume 3419, 34191D (1998) https://doi.org/10.1117/12.311035

KEYWORDS: Photodiodes, Automatic alignment, Spatial filters, Silicon, Feedback control

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Showing 5 of 15 publications

Conference Committee Involvement (3)

MEMS, MOEMS, and Micromachining II

3 April 2006 | Strasbourg, France

MEMS, MOEMS, and Micromachining

29 April 2004 | Strasbourg, France

Micromachining and Microfabrication Process Technology VIII

27 January 2003 | San Jose, CA, United States

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