Minwoo Park
Telecom Manager at SK Hynix
SPIE Involvement:
Publications (3)

Proceedings Article | 24 March 2016 Paper
Gyoyeon Jo, Sunkeun Ji, Shinyoung Kim, Hyunwoo Kang, Minwoo Park, Sangwoo Kim, Jungchan Kim, Chanha Park, Hyunjo Yang, Kotaro Maruyama, Byungjun Park
Proceedings Volume 9778, 97781J (2016) https://doi.org/10.1117/12.2218937
KEYWORDS: Overlay metrology, Metrology, Optical testing, Defect inspection, Inspection, Defect detection, Control systems, Semiconductors, Databases, Distortion, Chemical mechanical planarization, Etching

Proceedings Article | 19 March 2015 Paper
Sunkeun Ji, Gyun Yoo, Gyoyeon Jo, Hyunwoo Kang, Minwoo Park, Jungchan Kim, Chanha Park, Hyunjo Yang, Donggyu Yim, Kotaro Maruyama, Byungjun Park, Masahiro Yamamoto
Proceedings Volume 9424, 942415 (2015) https://doi.org/10.1117/12.2085464
KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Data analysis, Etching, Optical lithography, Double patterning technology, Imaging systems, Error analysis, Distortion

Proceedings Article | 18 March 2015 Paper
Jinhyuck Jun, Minwoo Park, Chanha Park, Hyunjo Yang, Donggyu Yim, Munhoe Do, Dongchan Lee, Taehoon Kim, Junghoe Choi, Gerard Luk-Pat, Alex Miloslavsky
Proceedings Volume 9427, 94270D (2015) https://doi.org/10.1117/12.2085460
KEYWORDS: Atrial fibrillation, Semiconducting wafers, Photomasks, Critical dimension metrology, Optical proximity correction, Nanoimprint lithography, Lithography, Printing, SRAF, Manufacturing

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