Minwook Kang
at Yonsei Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | November 17, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Etching, Argon, Dry etching, Chromium, Emission spectroscopy, Photomasks, Plasma etching, Critical dimension metrology, Chlorine, Plasma

PROCEEDINGS ARTICLE | January 9, 2015
Proc. SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)
KEYWORDS: Mirrors, Optical lithography, Image segmentation, Inspection, Optical inspection, Micromirrors, Photomasks, Charge-coupled devices, Maskless lithography, Digital micromirror devices

PROCEEDINGS ARTICLE | January 9, 2015
Proc. SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)
KEYWORDS: Infrared sensors, Mid-IR, Sensors, Spectroscopy, Infrared spectroscopy, Detector arrays, Black bodies, Infrared signatures, Infrared countermeasures, Diffraction gratings

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