Dr. Mira Park
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 9, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Wafer-level optics, Semiconductors, Finite-difference time-domain method, Defect detection, Polarization, Inspection, Reflectivity, Optical inspection, Optical simulations, Semiconducting wafers

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