Dr. Mireille Maenhoudt
Executive VP Research and Development at Heraeus Electro-Nite International NV
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 10 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Electroluminescence, Scanning electron microscopy, Printing, Photomasks, Double patterning technology, Semiconducting wafers

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Materials processing, Manufacturing, Photomasks, Double patterning technology, Immersion lithography, Algorithm development

Proceedings Article | 12 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Optical lithography, Silica, Etching, Silicon, Photoresist materials, Atomic layer deposition, Line width roughness, Plasma enhanced chemical vapor deposition, Double patterning technology, Semiconducting wafers

Proceedings Article | 17 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Scanners, Scanning electron microscopy, Scatterometry, Process control, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Oxides, Optical lithography, Etching, Scanners, Electroluminescence, Photomasks, Critical dimension metrology, Semiconducting wafers, Photoresist developing, Tin

Showing 5 of 32 publications
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