Miri Kish-Dagan
VP R&D at Raicol Crystals Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Metals, Optical alignment, Semiconducting wafers, Overlay metrology, Data transmission, Oxides, Scanning probe microscopy, Image sensors, CMOS sensors, Phase modulation

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Phase modulation, Data modeling, Process control, Control systems, Overlay metrology, Semiconducting wafers, Metrology, Feedback control, Semiconductors, Manufacturing

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Manufacturing, Semiconductors, Nomenclature, Lithography, Control systems, Overlay metrology, Process control, Information technology, Semiconducting wafers, System integration

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