Dr. Miroslav Horacek
at Institute of Scientific Instruments of the CAS vvi
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 May 2017 Paper
M. Horacek, P. Meluzin, S. Kratky, M. Matejka, V. Kolarik
Proceedings Volume 10233, 102331G (2017) https://doi.org/10.1117/12.2265835
KEYWORDS: Electron beams, Statistical analysis, Lithography, Diffraction gratings, Diffraction, Electron beam lithography, Holography, Algorithm development, Metals, Performance modeling

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