Dr. Miroslav Horacek
at Institute of Scientific Instruments of the CAS vvi
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 May 2017
Proc. SPIE. 10233, Holography: Advances and Modern Trends V
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Electron beams, Holography, Statistical analysis, Metals, Algorithm development, Performance modeling, Diffraction gratings

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