Misako Saito
Group Leader at Tokyo Electron AT Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Electron beams, Defect detection, Silica, Particles, Silicon, Scanning electron microscopy, Monte Carlo methods, Selenium, Electron transport, Defect inspection

Proceedings Article | 16 April 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Electron beams, Defect detection, Metals, Inspection, Scanning electron microscopy, Monte Carlo methods, Photomasks, Semiconducting wafers, Tin, Defect inspection

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Electron beams, FT-IR spectroscopy, Defect detection, Etching, Resistance, Inspection, Inspection equipment, Critical dimension metrology, Semiconducting wafers, Defect inspection

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Electron beams, Defect detection, Manufacturing, Resistance, Inspection, Scanning electron microscopy, Monte Carlo methods, Bridges, Photoresist processing, Defect inspection

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