Dr. Mitsuhiro Horade
at Osaka Univ
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | September 17, 2012
Proc. SPIE. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Mirrors, X-ray optics, Metals, X-rays, Silicon, Coating, Spatial resolution, Semiconducting wafers

PROCEEDINGS ARTICLE | October 12, 2011
Proc. SPIE. 8147, Optics for EUV, X-Ray, and Gamma-Ray Astronomy V
KEYWORDS: Microelectromechanical systems, Mirrors, X-ray optics, X-rays, Silicon, Surface roughness, Magnetism, Deep reactive ion etching, Abrasives, Optics manufacturing

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Fabrication, Polymethylmethacrylate, Blood, Skin, X-rays, Photomasks, Optical alignment, Electroplating, X-ray lithography, Liquids

PROCEEDINGS ARTICLE | January 4, 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Fabrication, Gold, Polymethylmethacrylate, Etching, X-rays, 3D modeling, Photomasks, Synchrotron radiation, X-ray lithography, Auroras

PROCEEDINGS ARTICLE | December 29, 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Minerals, Polymethylmethacrylate, Point-of-care devices, Sensors, Blood, Electrodes, Ions, Sensing systems, Field effect transistors, Chlorine

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Fabrication, Microlens array, Polymethylmethacrylate, Etching, X-rays, X-ray diffraction, Scanning electron microscopy, Photomasks, X-ray lithography, X-ray fluorescence spectroscopy

Showing 5 of 6 publications
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