Dr. Mitsuru Sato
at TOK
SPIE Involvement:
Publications (11)

Proceedings Article | 30 March 2010 Paper
Proceedings Volume 7639, 76390U (2010) https://doi.org/10.1117/12.846391
KEYWORDS: Fullerenes, Etching, Nanolithography, Electron beams, Lithography, Polymers, Reactive ion etching, Ultraviolet radiation, Line edge roughness, Silicon

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69230N (2008) https://doi.org/10.1117/12.771835
KEYWORDS: Fullerenes, Etching, Electron beams, Silicon, Nanolithography, Ultraviolet radiation, Photoresist processing, Line edge roughness, Polymers, Scanning electron microscopy

Proceedings Article | 23 March 2007 Paper
Proceedings Volume 6519, 65192G (2007) https://doi.org/10.1117/12.711656
KEYWORDS: Polymers, Chemically amplified resists, Photoresist materials, Ionizing radiation, Silicon, Electron beams, Semiconducting wafers, Scanning electron microscopy, Photomicroscopy, Halogens

Proceedings Article | 29 March 2006 Paper
Proceedings Volume 6153, 61533O (2006) https://doi.org/10.1117/12.656262
KEYWORDS: Polymers, Absorption, Electron beams, Ionization, Chemically amplified resists, Ionizing radiation, Picosecond phenomena, Silver, X-rays, Extreme ultraviolet lithography

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6151, 615127 (2006) https://doi.org/10.1117/12.655976
KEYWORDS: Photoresist processing, Failure analysis, Etching, Back end of line, Semiconducting wafers, Critical dimension metrology, Electron beam lithography, Lithography, Extreme ultraviolet lithography, Photomasks

Showing 5 of 11 publications
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