The MPEG-4 BSAC (Bit Sliced Arithmetic Coding) is a fine-grain scalable codec with layered structure which consists
of a single base-layer and several enhancement layers. The scalable functionality allows us to decode the subsets of a full
bitstream and to deliver audio contents adaptively under conditions of heterogeneous network and devices, and user
interaction. This bitrate scalability can be provided at the cost of high frequency components. It means that the decoded
output of BSAC sounds muffled as the transmitted layers become less and less due to deprived conditions of network
and devices. The goal of the proposed technology is to compensate the missing high frequency components, while
maintaining the fine grain scalability of BSAC. This paper describes the integration of SBR (Spectral Bandwidth
Replication) tool to existing MPEG-4 BSAC. Listening test results show that the sound quality of BSAC is improved
when the full bitstream is truncated for lower bitrates, and this quality is comparable to that of BSAC using SBR tool
without truncation at the same bitrate.
E-beam lithography simulation is one of the effective tools for understanding the complex e-beam lithography process. In-house E-beam Lithography Simulator, ELIS, has been developed in order to analyze the mask CD errors. ELIS adopts the Monte Carlo method to accurately describe the electron scattering and energy deposition on the resist, and fits this result with more than two Gaussians to convolute with pattern shape efficiently and rapidly. This simulator provides the function of the proximity effect correction (PEC) and fogging effect correction. ELIS, moreover, can simulate the post exposure bake step (PEB), therefore, latent image and resist profile is given for chemically amplified resists (CAR). From the exposure simulation with ELIS, the amoung of CD variation regarding different density patterns in various conditions can be predicted. The simulation results are matched with experimented values within 5% error. Even though PEC corrects perfectly, the non-zero mean-to-target (MTT) induces the CD error. The CD errors with dose modulation and GHOST along with the MTT variation have been studied with ELIS. Also, we show these errors increasing after applying fogging effect correction.